On the Method of Monitoring and Optimal Control of RF-Plasma
نویسندگان
چکیده
Abstract – A new strategy of reaching efficient matched conditions at the maximum speed in RF power delivery systems for plasma processes is proposed and analyzed. Presented method incorporates unique properties of high speed, automatic discrete matching networks, allowing creation of shortest trajectories and bypassing inhibited states of network parameters. The special matching network model is used to test optimal matching path finder method which allows to maximize the delivered power at the minimum time.
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